LASER SPECTROSCOPIC INVESTIGATION OF PARTICLE BEHAVIOR IN A LASER-ABLATION PROCESS

Authors
OKADA T NAKATA Y KUMUDUNI WKA MAEDA M
Citation
T. Okada et al., LASER SPECTROSCOPIC INVESTIGATION OF PARTICLE BEHAVIOR IN A LASER-ABLATION PROCESS, Applied surface science, 80, 1994, pp. 136-140
Citations number
7
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical","Materials Science, Coatings & Films
Journal title
Applied surface science → ACNP
ISSN journal
01694332
Volume
80
Year of publication
1994
Pages
136 - 140
Database
ISI
SICI code
0169-4332(1994)80:<136:LSIOPB>2.0.ZU;2-S
Abstract
The behavior of particles ejected in a pulsed-laser deposition (PLD) o f a high-temperature superconducting (high-T(c)) YBa2Cu3O7-delta (YBCO ) thin film was investigated by one-dimensional laser-induced fluoresc ence spectroscopy. It is shown that particles stopped at a finite dist ance from a target and afterwards they are transported by diffusion. T he behavior of ejected particles near the substrate was also examined in-situ during the deposition of high-T(c) films. Based on these resul ts, a model for the pulse laser deposition of thin films in an ambient gas is presented.