IN-SITU SEM OBSERVATIONS OF ELECTROMIGRATION VOIDS IN AL LINES UNDER PASSIVATION

Authors
FLINN PA MADDEN MC MARIEB TN
Citation
Pa. Flinn et al., IN-SITU SEM OBSERVATIONS OF ELECTROMIGRATION VOIDS IN AL LINES UNDER PASSIVATION, MRS bulletin, 19(6), 1994, pp. 51-55
Citations number
16
Categorie Soggetti
Material Science","Physics, Applied
Journal title
MRS bulletin → ACNP
ISSN journal
08837694
Volume
19
Issue
6
Year of publication
1994
Pages
51 - 55
Database
ISI
SICI code
0883-7694(1994)19:6<51:ISOOEV>2.0.ZU;2-G