VICKERS HARDNESS MEASUREMENT OF ION-IMPLANTED MGO

Authors
AOKI Y RUCK DM VOGT D LEIBLE K KHUBEIS I MEYER O
Citation
Y. Aoki et al., VICKERS HARDNESS MEASUREMENT OF ION-IMPLANTED MGO, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 91(1-4), 1994, pp. 247-251
Citations number
10
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
91
Issue
1-4
Year of publication
1994
Pages
247 - 251
Database
ISI
SICI code
0168-583X(1994)91:1-4<247:VHMOIM>2.0.ZU;2-E
Abstract
The Vickers hardness was measured for single crystals of MgO(100) impl anted with 130 keV or 1.8 MeV Ar+ ions and with 400 keV Xe2+ ions by m eans of the indentation technique with an applied load of 0.4-30 mN. I mplantation with 130 keV Ar+ and 400 keV Xe2+ gave similar results in hardening of MgO surface layers. In addition, the dose dependence of t he measured hardness curve showed that a softening mechanism takes pla ce at high doses. High energy implantation (1.8 MeV Ar+) made a harden ed surface layer on MgO. This hardened layer also became softer at hig h doses.