IMAGE-EELS - SIMULTANEOUS RECORDING OF MULTIPLE ELECTRON-ENERGY-LOSS SPECTRA FROM SERIES OF ELECTRON SPECTROSCOPIC IMAGES

A new approach for element microanalysis with energy-filtering transmi ssion electron microscopy (EFTEM) is presented which was accomplished with the CEM 902 electron microscope (Zeiss, Germany). This method is called Image-EELS, because it is a synthesis of electron energy-loss s pectroscopy (EELS) and electron spectroscopic imaging (ESI). Series of energy-filtered images at increasing energy losses are recorded from one area with a TV camera. In a second step the intensity of selected regions in the image stack is measured with an image analysis system a nd plotted as a function of the energy loss. Thus many spectra from di fferent objects can be calculated from one image series and compared w ith each other. The spatial resolution of EELS is considerably enhance d, the noise is decreased because many pixels from irregular objects a re integrated, and the information from ESI can be analysed as a funct ion of the energy loss.