NATURE OF DEFECTS AND THEIR RELATIONSHIP WITH THE GROWTH AND PROPERTIES OF DIAMOND FILMS

We present results for the lattice defects in diamond films and discus s interplay between the defects and growth rate of the films grown by chemical vapor deposition and dc plasma arc jet. We identify the natur e of the defects and present defect depth profiles for films grown und er different conditions of these two techniques. Defect density and fi lm properties change significantly with growth parameters and the grow th rate is related to defects in the film.