This paper presents a new approach for processing experimental nuclear
microanalysis data based on a general mathematical model for the ener
gy spectrum. This enables joint processing of any number of nuclear re
actions and Rutherford backscattering spectra, and automatic computing
of elemental and defect composition and depth profiles as well as lay
er thicknesses. A regularizing reduction approach is applied for depth
profiling and composition reconstruction. The corresponding software
BEAM EXPERT 1.5 developed for IBM PC is assumed to serve as an integra
ted environment for nuclear microanalysis investigations.