GROWTH OF CUBIC BORON-NITRIDE FILMS BY HOT-FILAMENT ASSISTED RF PLASMA CVD

Authors
GUO YP SONG ZH ZHANG YX ZHANG FQ CHEN GG
Citation
Yp. Guo et al., GROWTH OF CUBIC BORON-NITRIDE FILMS BY HOT-FILAMENT ASSISTED RF PLASMA CVD, Physica status solidi. a, Applied research, 143(1), 1994, pp. 110000013-110000017
Citations number
13
Categorie Soggetti
Physics, Condensed Matter
Journal title
Physica status solidi. a, Applied research → ACNP
ISSN journal
00318965
Volume
143
Issue
1
Year of publication
1994
Pages
110000013 - 110000017
Database
ISI
SICI code
0031-8965(1994)143:1<110000013:GOCBFB>2.0.ZU;2-9