DEVICE FOR THE UV IRRADIATION OF THE SURFACE OF MATERIALS IN AN OZONE-CONTAINING ATMOSPHERE

Authors
LEVINA OV PUKHOV AM
Citation
Ov. Levina et Am. Pukhov, DEVICE FOR THE UV IRRADIATION OF THE SURFACE OF MATERIALS IN AN OZONE-CONTAINING ATMOSPHERE, Journal of optical technology, 61(5), 1994, pp. 405-407
Citations number
NO
Categorie Soggetti
Optics
Journal title
Journal of optical technology → ACNP
ISSN journal
10709762
Volume
61
Issue
5
Year of publication
1994
Pages
405 - 407
Database
ISI
SICI code
1070-9762(1994)61:5<405:DFTUIO>2.0.ZU;2-O
Abstract
A device is described for the UV irradiation of the surface of materia ls in an ozone-containing atmosphere. Processes are considered for rem oving adsorbed hydrocarbon compounds from the surface layer of polishe d single crystals and etching submicron polymer films.