A theoretical study is presented of he equilibrium domain microstructu
re expected for a thin film grown epitaxially onto single-crystal subs
trate as a function of temperature, film thickness, and lattice misfit
for the case when the film can undergo a structural phase transition.
The theory treats the epitaxial interface at the level of the Frenkel
-Kontorova model and takes into account domain-wall energies and bulk-
elasticity effects in both the film and the substrate. Existing predic
tions for this problem by Roitburd are reproduced when the epitaxial i
nterface is commensurate. Results are obtained for the general case wh
en the interface is incommensurate. The corresponding domain structure
generically involves multiple phases.