3-AXIS CAPACITIVE ACCELEROMETER WITH UNIFORM AXIAL SENSITIVITIES

Authors
MINETA T KOBAYASHI S WATANABE Y KANAUCHI S NAKAGAWA I SUGANUMA E ESASHI M
Citation
T. Mineta et al., 3-AXIS CAPACITIVE ACCELEROMETER WITH UNIFORM AXIAL SENSITIVITIES, Journal of micromechanics and microengineering, 6(4), 1996, pp. 431-435
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic","Engineering, Mechanical
Journal title
Journal of micromechanics and microengineering → ACNP
ISSN journal
09601317
Volume
6
Issue
4
Year of publication
1996
Pages
431 - 435
Database
ISI
SICI code
0960-1317(1996)6:4<431:3CAWUA>2.0.ZU;2-U
Abstract
A three-axis capacitive accelerometer which has uniform sensitivities to three axes was developed using a micromachining technique. This sen sor has a seismic mass whose center of gravity is raised above suspend ing beams so that longitudinal and lateral accelerations can be detect ed by parallel shift and tilt of a seismic mass, respectively. Uniform axial sensitivities without cross axis sensitivity could be realized by a three-dimensional sensor structure.