NUMERICAL MODELING AND CHARACTERIZATION OF ELECTROLYTE INSULATOR SEMICONDUCTOR SENSOR SYSTEMS

A model is proposed to describe integrated ion-sensitive devices based on Electrolyte/Insulator/Semiconductor systems. In particular a speci al type of sensor will be discussed based on a pure Electrolyte/Insula tor/Semiconductor structure in the constant capacitance mode. The foll owing models will serve to describe the sensor effects: The site-bindi ng model for pH-sensors and a single-site model for pH-sensors. The th eory of the field effect has been integrated into the complete model. In this way pH/pF responses and quasistatic (lf) as well as rf C(V) ch aracteristics can be simulated. A comparison between measurements and simulations can be made for the pH EIS structures with ZrO2, SrTiO3 an d pF EIS structures with LaF3.