B. Oertel et al., CAPACITIVE SENSOR SYSTEM FOR MEASUREMENT OF TEMPERATURE AND HUMIDITY, Fresenius' journal of analytical chemistry, 349(5), 1994, pp. 391-393
Dielectrical glass-ceramic materials for capacitive sensors to measure
temperature and humidity have been developed. These sensors are suite
d for temperature measurement between 4.2 and 100 K (low temperature r
ange), but also for temperatures up to 573 K. The measurement of gas h
umidity is possible between 5 and 95% R.H. The sensors can be used in
multicomponent sensor systems under industrial conditions.