ANALYSIS OF IR-SPECTRA OF A-SINRH ALLOYS ON THE BASIS OF THE INDUCTION MODEL

IR absorption spectra of a-SiN(r):H samples have been measured. The sa mples were produced by decomposition of the gaseous mixture (10% SiH4 + 90% H-2) + NH3 in the plasma of a glow discharge. The effect of the composition and the local surroundings on the oscillator strengths of the bands due to stretching vibrations of Si-H and Si-N bonds is discu ssed. The induction model is used to plot the frequencies of the stret ching vibrations of the Si-H bond as a function of the composition for various types of local surroundings. A resolution into peaks of the b and corresponding to the Si-H stretching mode and a comparison of the frequencies of these peaks with theoretical values reveals that the co mposition in a-SiN(r):H is inhomogeneous.