The surface degradation of c-axis oriented YBa2Cu3O7-delta thin films
due to air, CO2, N2, O2, and vacuum exposure has been studied with ref
lection high-energy electron diffraction (RHEED), scanning tunneling m
icroscopy, and contact resistivity measurements. The formation of an a
morphous surface reaction layer upon exposure to air and CO2 is monito
red with RHEED and correlated with an increase in contact resistivity.
The contact resistivity of samples exposed to air increases with time
t as rho(c) = (1.0 x 10(-7) OMEGA cm2)e(square-root t/64 min). Surfac
es exposed to CO2 show a similar degradation while surfaces exposed to
N2 showed a slightly different degradation mechanism. Vacuum exposed
surfaces how little increase in contact resistivity, indicating no lon
g-term surface oxygen loss.