An interparticle glass matrix in ruthenium dioxide-based thick film re
sistors has been studied intensively by means of analytical and high r
esolution transmission electron microscopy. The ruthenium dioxide phas
e interacts with lead-borosilicate glass at high temperature by dissol
ving ruthenium ions and incorporating a small number of lead and alumi
num ions on the surface. Ruthenium ions diffuse through the glass netw
ork at least over a distance of 1 mum during firing, but are accommoda
ted in the glass structure by an amount only less than 7 at. % at room
temperature. High resolution electron microscopy reveals numerous rut
henium-pyrochlore crystallites in high-lead glasses, but hardly any Ru
-based clusters/crystallites in low-lead glasses, where lead-rich glas
s clusters due to glass immiscibility and reduced lead metal clusters
are more commonly observed instead of ruthenium clusters. Lead oxide i
s prone to reduction both in high- and low-lead glasses upon irradiati
ng with a high-energy incident electron beam. Comparison with gold-bas
ed resistor and estimation of average dispersion length of ruthenium c
lusters, 2 to 4 nm, prefer the model of electron hopping via ruthenium
clusters/crystallites as a dominant conduction mechanism in thick fil
m resistors.