INFLUENCE OF CRYSTAL-STRUCTURE ON THE LIGHT SCATTER OF ZIRCONIUM-OXIDE FILMS

The relationship of Light scatter by a thin film to thin-film morpholo gy is examined. Light scatter by reactively evaporated ZrO2 thin films is analyzed by using in situ total internal reflection microscopy and angle-resolved scatterometry. Film crystal structure is analyzed by t ransmission electron microscopy and x-ray diffraction. Relations betwe en film crystal structure and film scatter are established by using th is information. Surface topography is analyzed by the use of scanning force microscopy. Results of a spectrophotometric determination of the film refractive index are reported. The film scatter is found to be s ensitive to the crystal phase of the film, which is a function of subs trate deposition temperature. A simple method of separating bulk from surface scatter is described. (C) 1997 Optical Society of America.