The impact of hot-carrier (HC) stress on CMOS inverters at 77K was exa
mined as a function of temperature. It was found that the degradation
in inverter propagation delay was about one order less than that of th
e device transconductance degradation. Activation energy (E(A)) of pro
pagation delay exhibited two distinct values from 295K to 77K, with a
transition at around 175K for virgin and stressed inverters. The impro
vement of propagation delay and voltage transfer characteristic (VTC)
at 77K compared to 295K was larger for virgin than HC stressed inverte
rs.