HIGH T(C) SUPERCONDUCTIVE THIN-FILMS ON SEMICONDUCTOR SUBSTRATES

Citation
P. Lecoeur et al., HIGH T(C) SUPERCONDUCTIVE THIN-FILMS ON SEMICONDUCTOR SUBSTRATES, Journal de physique. IV, 4(C6), 1994, pp. 185-188
Citations number
6
Categorie Soggetti
Physics
Journal title
ISSN journal
11554339
Volume
4
Issue
C6
Year of publication
1994
Pages
185 - 188
Database
ISI
SICI code
1155-4339(1994)4:C6<185:HTSTOS>2.0.ZU;2-R
Abstract
The deposition of superconductive thin films on semiconducting substra tes is one of the most important goals of technological application in <<hybrid>> devices. We present in this paper the role of the buffer l ayer between silicon and the superconductive film. These insulating bu ffer layers induce MIS properties which can be used in microelectronic s.