PRODUCTION OF UNIFORM LARGE-DIAMETER RADIOFREQUENCY DISCHARGE PLASMA

Authors
LI YL IIZUKA S SATO N
Citation
Yl. Li et al., PRODUCTION OF UNIFORM LARGE-DIAMETER RADIOFREQUENCY DISCHARGE PLASMA, Applied physics letters, 65(1), 1994, pp. 28-30
Citations number
4
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
65
Issue
1
Year of publication
1994
Pages
28 - 30
Database
ISI
SICI code
0003-6951(1994)65:1<28:POULRD>2.0.ZU;2-F
Abstract
A new radio-frequency (rf) discharge plasma source at frequency of 13. 56 MHz is presented. The rf plasma is produced by a modified magnetron -typed rf discharge using a cylindrical electrode with permanent magne t rings. The electron density of 2.5 x 10(10) cm-3 with an electron te mperature of 3.7 eV, uniform within a few percent over 50 cm in diamet er, is obtained on both sides at 5-6 cm from the axial center of the r f electrode when the rf power is 600 W under argon pressure of 3.6 x 1 0(-4) Torr.