The resistivity of SnO2 films fabricated by spray pyrolysis of SnCl4 m
ethanolic solutions can vary over nearly six orders of magnitude depen
ding on the conditions of preparation [substrate temperature, concentr
ation of SnCl4 and nature of the dopant (Cl, F, Sb)]. At low carrier d
ensity, the resistivity is determined by charge trapping at grain boun
daries. In the case of highly degenerated materials, grain boundaries
do not play a role anymore. The film resistivity is fully controlled b
y the bulk grain electrical properties, which are found to be dependen
t on the defect structure generated by the dopant. Thanks to Transmiss
ion Electron Microscopy, it is shown that chlorine or fluorine incorpo
ration promotes the formation of the same neutral defects, which are {
011} cassiterite twins. On the other hand, antimony gives rise to spec
ific charged structural defects which strongly lower the carrier mobil
ity. The electrical transport properties of F-doped SnO2 films are bet
ter than those of Sb-doped materials. Considering the interfacial elec
tron transfer with a redox system. Sb-doped electrodes are the most ef
ficient because they achieve the highest carrier density, with perform
ances approaching those of massive metal electrodes.