DESIGN-FEATURES OF A HIGH-INTENSITY, CESIUM-SPUTTER PLASMA-SPUTTER NEGATIVE-ION SOURCE

Citation
Gd. Alton et al., DESIGN-FEATURES OF A HIGH-INTENSITY, CESIUM-SPUTTER PLASMA-SPUTTER NEGATIVE-ION SOURCE, Review of scientific instruments, 65(6), 1994, pp. 2006-2011
Citations number
25
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
ISSN journal
00346748
Volume
65
Issue
6
Year of publication
1994
Pages
2006 - 2011
Database
ISI
SICI code
0034-6748(1994)65:6<2006:DOAHCP>2.0.ZU;2-1
Abstract
A versatile, high-intensity, negative ion source has been designed and is now under construction which can be operated in either the cesium- sputter or plasma-sputter mode. The cesium-sputter mode can be effecte d by installation of a newly designed conical-geometry cesium-surface ionizer; for operation in the plasma-sputter mode, the surface ionizer is removed and either a bot filament or rf antenna plasma-discharge i gniter is installed. A multicusp magnetic field is specifically provid ed confining the plasma in the radial direction when the plasma-sputte r mode is selected. This arrangement allows comparison of the two mode s of operation. Brief descriptions of the design features, ion optics, and anticipated performances of the two source geometries will be pre sented in this report.