ELLIPTIC REFLECTOR LOW-PASS ENERGY FILTER FOR A LIQUID-METAL ION-SOURCE CLUSTER DEPOSITION SYSTEM

Authors
ANDERSON JF BERRY SD
Citation
Jf. Anderson et Sd. Berry, ELLIPTIC REFLECTOR LOW-PASS ENERGY FILTER FOR A LIQUID-METAL ION-SOURCE CLUSTER DEPOSITION SYSTEM, Review of scientific instruments, 65(6), 1994, pp. 2023-2027
Citations number
11
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
Journal title
Review of scientific instruments → ACNP
ISSN journal
00346748
Volume
65
Issue
6
Year of publication
1994
Pages
2023 - 2027
Database
ISI
SICI code
0034-6748(1994)65:6<2023:ERLEFF>2.0.ZU;2-D
Abstract
We describe the design, construction, and implementation of a low-pass energy filter for use with a liquid metal ion source (LMIS) cluster d eposition system. When combined with deceleration of cluster ions to a surface for landing, this filter provides bandpass energy selectivity for high resolution mass separation of clusters produced by the LMIS. We also present results of our initial testing, which shows the filte r has an experimental relative energy resolution of less than 0.3%.