STUDY OF MULTILAYER STRUCTURES BY SYNCHROTRON-RADIATION WITH SMALL-ANGLE DIFFRACTION METHOD

Authors
WANG J CUI MQ XU WX HUANG YY WANG DW LIU JF XIAN DC
Citation
J. Wang et al., STUDY OF MULTILAYER STRUCTURES BY SYNCHROTRON-RADIATION WITH SMALL-ANGLE DIFFRACTION METHOD, High energy physics & nuclear physics, 17(4), 1993, pp. 311-319
Citations number
NO
Categorie Soggetti
Physics, Particles & Fields","Physics, Nuclear
Journal title
High energy physics & nuclear physics → ACNP
ISSN journal
08999996
Volume
17
Issue
4
Year of publication
1993
Pages
311 - 319
Database
ISI
SICI code
0899-9996(1993)17:4<311:SOMSBS>2.0.ZU;2-C
Abstract
Small angle diffraction on W/Si multilayer fabricated by magnetron spu ttering is carried out at the diffraction station of Beijing Synchrotr on Radiation Facility (BSRF). We present the analysis on the periodici ty of the multilayer, the thickness of one period and the combination and give a comparison with the fitting result.