Several series of Co-Ni/Au multilayers were investigated using differe
nt X-ray diffraction methods. The compositions and thicknesses of the
Co-Ni layers were varied, and the influence of temperature treatment o
f gold buffer on the quality of the multilayers was studied. According
to the results, the quality of the multilayers is influenced primaril
y by the roughness of the substrate and the buffer. The Co-Ni/Au multi
layer systems grow predominantly with a replicative, highly correlated
roughness induced by the substrate and buffer roughness. A cumulative
roughness was found only rarely. In contrast, a decrease in the origi
nal roughness towards the sample surface was found for certain deposit
ion parameters.