STRUCTURAL-PROPERTIES OF DEUTERATED GERMANIUM NITROGEN ALLOYS

An infrared analysis of nonstoichiometric hydrogenated and deuterated germanium-nitrogen alloys is presented. The films were prepared by rf reactive sputtering of a c-Ge target in a gas mixture of Ar+N2+(H-2 or D2). The isotopic effect was used to identify the absorption bands as sociated with the alloy elements bonded to hydrogen. Its infrared spec tra pattern depends strongly on the preparation condition. Samples pre pared in the 100-300-degrees-C temperature range are stable, while tho se prepared at temperatures lower than 100-degrees-C show spontaneous atmospheric contamination. In this case, the evolution of the infrared spectra with the atmosphere exposing time for hydrogenated and deuter ated films was analyzed.