OPTICAL AND ELECTRICAL-PROPERTIES OF METAL-DIAMOND-LIKE ATOMIC-SCALE COMPOSITE (DLASC) FILMS AND DLASC SI HETEROSTRUCTURES/

Authors
POLYAKOV VI RUKOVISHNIKOV AI PEROV PI KHOMICH AV SUKHANOV AA DORFMAN BF PYPKIN BN ABRAIZOV MG DRUZ B
Citation
Vi. Polyakov et al., OPTICAL AND ELECTRICAL-PROPERTIES OF METAL-DIAMOND-LIKE ATOMIC-SCALE COMPOSITE (DLASC) FILMS AND DLASC SI HETEROSTRUCTURES/, Thin solid films, 292(1-2), 1997, pp. 91-95
Citations number
21
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
292
Issue
1-2
Year of publication
1997
Pages
91 - 95
Database
ISI
SICI code
0040-6090(1997)292:1-2<91:OAEOMA>2.0.ZU;2-1
Abstract
Diamond-like atomic-scale composite (DLASC) films deposited on (100) S i were studied by means of charge deep-level transient spectroscopy (Q -DLTS) and ellipsometry. Two peaks in the continuous spectrum of trapp ing centers were discriminated by the Q-DLTS technique: from the cente rs localized on the film-Si interface and from the centers localized i n the film. The dependence of their parameters an deposition condition s, thermal and radiation treatment was established. The Q-DLTS results correlate well with that obtained by positron annihilation spectrosco py.