ATOMIC-FORCE MICROSCOPY STUDY OF DIAMOND-LIKE ATOMIC-SCALE COMPOSITE FILMS

Authors
POLLAK FH DORFMAN B
Citation
Fh. Pollak et B. Dorfman, ATOMIC-FORCE MICROSCOPY STUDY OF DIAMOND-LIKE ATOMIC-SCALE COMPOSITE FILMS, Thin solid films, 292(1-2), 1997, pp. 173-178
Citations number
9
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
292
Issue
1-2
Year of publication
1997
Pages
173 - 178
Database
ISI
SICI code
0040-6090(1997)292:1-2<173:AMSODA>2.0.ZU;2-F
Abstract
Amorphous ''diamond-like/quartz-like'' composites a-(C:H/Si:O) constit ute a novel class of diamond-related materials with a number of unique bulk and surface properties. In order to gain a more fundamental unde rstanding of the growth and surface properties of these diamond-like a tomic-scale composite materials we have performed an atomic force micr oscopy investigation of the surfaces of a-(C:H/Si:O) films (deposited on Si (001) substrates) ranging in thickness from 50 Angstrom to 5 x 1 0(4) nm.