SnO2 thin films were prepared by the sol-gel process using an alcoholi
c solution of Sn(OC2H5)(4)2C(2)H(5)OH as the precursor. After subseque
nt annealing, the temperature of which was varied according to the sub
strate (oxidised silicon, glass or ceramic glass), the films were char
acterised by scanning electron microscopy, electron diffraction and Au
ger electron spectroscopy. The sensitivity of these films to variation
s in humidity was established for values in the range 0% to 93% relati
ve humidity.