P. Sheng et G. Chryssolouris, INVESTIGATION OF ACOUSTIC SENSING FOR LASER MACHINING PROCESSES .1. LASER DRILLING, Journal of materials processing technology, 43(2-4), 1994, pp. 125-144
An acoustic sensing technique has been developed for the in-process se
nsing of the erosion front condition during laser machining. This pape
r presents an analysis of acoustic sensing for blind and through-hole
drilling. Theoretical analysis of the relationship between resonant fr
equency and hole geometry were performed using a Helmholtz resonator a
nd wave equation models. The theoretical estimates are compared to exp
erimental results for the laser drilling of acrylic, aluminum oxide an
d steel. Process control schemes for hole depth and beam breakthrough
regulation using acoustic sensing are proposed.