SYNTHESIS AND MEASUREMENT OF NORMAL INCIDENCE X-RAY MULTILAYER MIRRORS OPTIMIZED FOR A PHOTON ENERGY OF 390 EV

Authors
KOZHEVNIKOV IV FEDORENKO AI KONDRATENKO VV PERSHIN YP YULIN SA ZUBAREV EN PADMORE HA CHEUNG KC VANDORSSEN GE ROPER M BALAKIREVA LL SEROV RV VINOGRADOV AV
Citation
Iv. Kozhevnikov et al., SYNTHESIS AND MEASUREMENT OF NORMAL INCIDENCE X-RAY MULTILAYER MIRRORS OPTIMIZED FOR A PHOTON ENERGY OF 390 EV, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 345(3), 1994, pp. 594-603
Citations number
47
Categorie Soggetti
Nuclear Sciences & Tecnology","Physics, Particles & Fields","Instument & Instrumentation",Spectroscopy
Journal title
Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment → ACNP
ISSN journal
01689002
Volume
345
Issue
3
Year of publication
1994
Pages
594 - 603
Database
ISI
SICI code
0168-9002(1994)345:3<594:SAMONI>2.0.ZU;2-R
Abstract
The problems inherent in the fabrication of short period multilayer mi rrors are discussed and results of the synthesis of multilayer structu res with nanometer period are presented. The shortest period observed is 13 angstrom for W-Si and W-B4C sputtered multilayers. Measurements of near normal incidence reflectivity at lambda = 31-32 angstrom are p resented for W-Sc multilayers with a period approximately 16 angstrom. The measured reflectivity reaches a maximum of 3.3% and is in good ag reement with theoretical modeling after the inclusion of interfacial r oughness.