BLUE-LIGHT EMISSION FROM HYDROGENATED AMORPHOUS-SILICON CARBIDE PREPARED BY XYLENE SOURCE IN PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION SYSTEM

Authors
MA TF CHEN KJ DU JF XU J LI W HUANG XF
Citation
Tf. Ma et al., BLUE-LIGHT EMISSION FROM HYDROGENATED AMORPHOUS-SILICON CARBIDE PREPARED BY XYLENE SOURCE IN PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION SYSTEM, Chinese Physics Letters, 13(12), 1996, pp. 947-949
Citations number
13
Categorie Soggetti
Physics
Journal title
Chinese Physics Letters → ACNP
ISSN journal
0256307X
Volume
13
Issue
12
Year of publication
1996
Pages
947 - 949
Database
ISI
SICI code
0256-307X(1996)13:12<947:BEFHAC>2.0.ZU;2-D
Abstract
We chose xylene C8H10 as carbon source instead of conventional methane CH4 to fabricate a-Si1-xCx:H films using plasma-enhanced chemial vapo ur deposition method. The optical band gap of this material could be w idened to 3.1 eV. And the infrared absorption spectra of our films man ifest the existence of aromatic ring in them. Strong blue light emissi on with a peak wavelength of 490 nm has been observed at room temperat ure.