AN ULTRAFINE MOTION TABLE USING PIEZOELECTRIC ACTUATOR FOR ULTRAPRECISION GRINDING

Authors
OTSUKA J KOSHIMIZU S HATA S SHIMOKOHBE A
Citation
J. Otsuka et al., AN ULTRAFINE MOTION TABLE USING PIEZOELECTRIC ACTUATOR FOR ULTRAPRECISION GRINDING, International journal of the Japan Society for Precision Engineering, 30(4), 1996, pp. 345-346
Citations number
3
Categorie Soggetti
Engineering, Mechanical
Journal title
International journal of the Japan Society for Precision Engineering → ACNP
ISSN journal
0916782X
Volume
30
Issue
4
Year of publication
1996
Pages
345 - 346
Database
ISI
SICI code
0916-782X(1996)30:4<345:AUMTUP>2.0.ZU;2-U