ENHANCED METHYL-RADICAL PRODUCTION IN AN AR-CH4 PIN-HOLLOW CATHODE-DISCHARGE

Citation
S. Iizuka et al., ENHANCED METHYL-RADICAL PRODUCTION IN AN AR-CH4 PIN-HOLLOW CATHODE-DISCHARGE, Applied physics letters, 64(14), 1994, pp. 1786-1788
Citations number
15
Categorie Soggetti
Physics, Applied
Journal title
ISSN journal
00036951
Volume
64
Issue
14
Year of publication
1994
Pages
1786 - 1788
Database
ISI
SICI code
0003-6951(1994)64:14<1786:EMPIAA>2.0.ZU;2-L
Abstract
A methyl-radical formation is observed to be enhanced in an Ar-CH4 dis charge plasma using a hollow cathode with movable pins inside. In the discharge with pins, high energy electrons in the radial edge region o f the plasma column produce methyl radicals. They diffuse toward the c entral region of the plasma column, increasing their density, where th e electron temperature is so low (congruent-to 0.4 eV) that there occu rs no reaction to decrease the methyl-radical density.