SMOOTH POLYCRYSTALLINE CERAMIC SUBSTRATES WITH ENHANCED METAL ADHESION BY PULSED EXCIMER-LASER PROCESSING

Authors
LOWNDES DH DESILVA M GODBOLE MJ PEDRAZA AJ THUNDAT T WARMACK RJ
Citation
Dh. Lowndes et al., SMOOTH POLYCRYSTALLINE CERAMIC SUBSTRATES WITH ENHANCED METAL ADHESION BY PULSED EXCIMER-LASER PROCESSING, Applied physics letters, 64(14), 1994, pp. 1791-1793
Citations number
17
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
64
Issue
14
Year of publication
1994
Pages
1791 - 1793
Database
ISI
SICI code
0003-6951(1994)64:14<1791:SPCSWE>2.0.ZU;2-N
Abstract
Multishot pulsed XeCl (308 nm) excimer laser irradiation of commercial fine-grained polycrystalline alumina substrates is found to significa ntly improve their properties for metal film-bonding-applications. A s moother surface finish is obtained, and the adhesion strength of subse quently deposited copper films to the laser-treated alumina surface is increased by a factor of 3-5 (200%-400%) under optimum laser conditio ns. Smoothing occurs when the alumina melts and undergoes molten flow before resolidifying. XPS measurements suggest that electrical activat ion of the near-surface region also may contribute to the enhanced cop per adhesion.