We report on the excellent thermal stability of Ir-Al/GaAs Schottky co
ntact based on sequentially evaporated Ir-Al bimetallic system with an
aluminum concentration of approximately 25 at. %. The contact system
is stable up to 950-degrees-C for 10 s (capless rapid thermal annealin
g) and exhibits an enhancement of the barrier height with the temperat
ure of annealing.