SECONDARY-ELECTRON EMISSION ENHANCEMENT AND DEFECT CONTRAST FROM DIAMOND FOLLOWING EXPOSURE TO ATOMIC-HYDROGEN

Citation
Dp. Malta et al., SECONDARY-ELECTRON EMISSION ENHANCEMENT AND DEFECT CONTRAST FROM DIAMOND FOLLOWING EXPOSURE TO ATOMIC-HYDROGEN, Applied physics letters, 64(15), 1994, pp. 1929-1931
Citations number
10
Categorie Soggetti
Physics, Applied
Journal title
ISSN journal
00036951
Volume
64
Issue
15
Year of publication
1994
Pages
1929 - 1931
Database
ISI
SICI code
0003-6951(1994)64:15<1929:SEEADC>2.0.ZU;2-U
Abstract
Polished nominal (100) surfaces of four types of diamonds were exposed to atomic hydrogen by hot filament cracking of H-2 gas or by immersio n in a H-2 plasma discharge. Both types IIa and IIb (100) diamond surf aces exhibited the following characteristic changes: (a) secondary ele ctron (SE) yield increased by a factor of approximately 30 as measured in a scanning electron microscope (SEM), (b) near-surface, nontopogra phical defects were observable directly using the conventional SE mode of the SEM, (c) surface conductance increased by up to 10 orders of m agnitude. These changes were observed only weakly in nitrogen-containi ng types Ia and Ib diamonds.