HIGH SIGNAL-TO-NOISE LEVEL ION-BEAM-INDUCED CHARGE IMAGES

Authors
BREESE MBH LAIRD JS MOLONEY GR SAINT A JAMIESON DN
Citation
Mbh. Breese et al., HIGH SIGNAL-TO-NOISE LEVEL ION-BEAM-INDUCED CHARGE IMAGES, Applied physics letters, 64(15), 1994, pp. 1962-1964
Citations number
10
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
64
Issue
15
Year of publication
1994
Pages
1962 - 1964
Database
ISI
SICI code
0003-6951(1994)64:15<1962:HSLICI>2.0.ZU;2-K
Abstract
The use of MeV a particles to generate ion beam induced charge images with a signal to noise level approximately ten times larger than previ ously obtained using protons is described. The effect of a particle in duced damage on the resultant image contrast is shown and a method of image formation in which the effects of ion induced damage are compens ated for is described which enables the use of a higher ion dose.