CHARGE NEUTRALIZATION DURING HIGH-CURRENT ION-IMPLANTATION

Authors
ENGLAND J ITO H CURRENT MI KAMATA T MALONE P
Citation
J. England et al., CHARGE NEUTRALIZATION DURING HIGH-CURRENT ION-IMPLANTATION, Solid state technology, 37(7), 1994, pp. 115
Citations number
11
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
37
Issue
7
Year of publication
1994
Database
ISI
SICI code
0038-111X(1994)37:7<115:CNDHI>2.0.ZU;2-Y