SURFACE MODIFICATION OF NON-SEMICONDUCTORS BY ION-BEAMS IN CHINA

Authors
LI HD JI CZ
Citation
Hd. Li et Cz. Ji, SURFACE MODIFICATION OF NON-SEMICONDUCTORS BY ION-BEAMS IN CHINA, Surface & coatings technology, 65(1-3), 1994, pp. 189-193
Citations number
23
Categorie Soggetti
Materials Science, Coatings & Films
Journal title
Surface & coatings technology → ACNP
ISSN journal
02578972
Volume
65
Issue
1-3
Year of publication
1994
Pages
189 - 193
Database
ISI
SICI code
0257-8972(1994)65:1-3<189:SMONBI>2.0.ZU;2-P
Abstract
The MEVVA ion source has stood out for the surface modification of mat erials by direct ion implantation. Concurrent implantation with multip le ion species is more efficient in tailoring the surface sensitive pr operties of solid materials. Ion beam assisted synthesis of surface co ating layers has also found increasing applications. The achievements obtained in the past few years in China will be reviewed and successfu l examples are introduced.