ALL METAL BAKEABLE PIEZOELECTRIC VALVE

An ultrahigh vacuum leak valve is described, which can be blaked up to 450-degrees-C. The throughput can be adjusted between 1x10(-10) and 5 x10(-6) Pa M3 S-1 . The actuator is a piezoelectric stack which can be easily removed and set back. The baking temperature with the actuator in place is limited by the thermal specifications of the piezoelectri c material. The inner surfaces, which are solely stainless-steel and g old, allow an almost unlimited choice of working gases.