An ultrahigh vacuum leak valve is described, which can be blaked up to
450-degrees-C. The throughput can be adjusted between 1x10(-10) and 5
x10(-6) Pa M3 S-1 . The actuator is a piezoelectric stack which can be
easily removed and set back. The baking temperature with the actuator
in place is limited by the thermal specifications of the piezoelectri
c material. The inner surfaces, which are solely stainless-steel and g
old, allow an almost unlimited choice of working gases.