EPITAXIAL-GROWTH OF OPTICAL WAVE-GUIDING LITAO3 FILMS BY EXCIMER-LASER ABLATION

Waveguiding epitaxial LiTaO3 films have been prepared on sapphire subs trates by the excimer laser ablation technique. The as-grown films wer e characterized by Raman scattering, XRD and SEM techniques, which rev ealed that epitaxial (001)-oriented and (012)-oriented LiTaO3 films wi th small surface roughness were achieved on sapphire (001) and (012) s ubstrates, respectively. Optical waveguiding properties were demonstra ted by m-line measurement of TM and TE multimodes.