A COMBINED DISTANCE AND SURFACE PROFILE MEASUREMENT SYSTEM FOR INDUSTRIAL APPLICATIONS - A EUROPEAN PROJECT

The paper reports the design, development and characterization of an e lectrooptical equipment suitable for distance measurements and three-d imensional gauging of surfaces of industrial interest. The equipment c omprises a dual-wavelength heterodyne interferometer for absolute dist ance measurements with a range of 20 m and an accuracy of 0.1 mm, that is integrated with a macroscopic scale, adaptive profilometer for thr ee-dimensional measurement of the shape to 1 mm. The performance of th e equipment is well suited for effective operation in industrial metro logy. The equipment has been developed by three partners, namely the D ipartimento di Elettronica per l'Automazione of the University of Bres cia, the Sezione Diagnostica Elettroottica of CISE, Milan, and the Ins titut fur technische Optik of the University of Stuttgart, in the fram ework of a European Project partially funded by the Community Bureau o f Reference.