M. Pellarin et al., HIGH-EFFICIENCY CLUSTER LASER VAPORIZATION SOURCES BASED ON TI - SAPPHIRE LASERS, Chemical physics letters, 224(3-4), 1994, pp. 338-344
A new laser vaporization source based on a flashlamp-pumped Ti: sapphi
re laser has been used to produce cluster beams. Its performance is co
mpared to the standard cluster sources based on neodyme YAG lasers. We
show that the Ti: sapphire source is much more efficient: the cluster
s deposition rates are about 30 times higher, and larger clusters are
produced. Finally the quality of nanostructured films is comparable to
those obtained by the standard source, but the time deposition is 30
times shorter. This opens new possibilities for film growth by cluster
deposition.