THE APPLICATION OF SCATTERING CROSS-SECTIONS TO ION FLUX MODELS IN DISCHARGE SHEATHS

We suggest consistent sets of Ar+ + Ar and Ar++ + Ar differential and integral cross sections for modeling ion scattering that take into acc ount differential scattering data and the fact that symmetric charge t ransfer collisions are one aspect of elastic scattering collisions. Th ese suggestions make possible a considerable improvement in the accura cy of future Monte Carlo calculations of the angular, energy, and temp oral distributions of Ar+ and Ar++ ions passing through the electrode sheaths of low-pressure, rf, and dc discharges in Ar. The cross sectio ns necessary for a proper modeling of the energy dissipation in the ga s and at the electrodes by fast neutral Ar atoms formed in symmetric-c harge-transfer collisions of Ar+ and Ar++ with Ar are also reviewed.