Deep-level transient spectroscopy has been performed on Si-doped GaAs
layers grown by molecular-beam epitaxy at substrate temperatures of 40
0-450-degrees-C. The lambda effect is taken into account and overlappi
ng peaks are analyzed numerically. An 0.65 eV electron trap of concent
ration 2 X 10(16) cm-3 is believed to be related to the As(Ga)-associa
ted 0.65 eV Hall-effect center, and also to the trap EB4 found in elec
tron-irradiated GaAs.