Planar waveguides were produced by K+-Cs+ exchange of Z-cut KTiOPO4 si
ngle domain crystals. The analysis of the refractive index profile has
shown an exponential Cs+ distribution in the exchanged layers. By exc
iting different waveguide modes, Raman spectra were obtained from guid
e depths with varying Cs doping. Significant changes have been observe
d between Raman spectra of Cs:KTiOPO4 and those of pure KTiOPO4 only i
n the region of external vibrations while the internal modes, due to v
ibrations of the TiO6 and PO4 groups, are practically the same. The ba
nds corresponding to the external vibrations were found to be strongly
influenced by the substitution indicating strong disorder in the latt
ice, and possibly a structural phase transition. Furthermore, Raman sp
ectroscopy proves to be an alternative technique for determining varia
tion in Cs composition.