Local structural information has been obtained from EXAFS and Laser In
duced Mass Analysis (LIMA) of samples of porous silicon produced under
various conditions, and these have been correlated with photoluminesc
ence excitation spectra. There is evidence for the existence of disord
ered silicon-silicon bonds in porous silicon. The XANES show the exist
ence of a feature in-between those assigned to Si-Si and Si-O bonding.
LIMA indicates that the presence of SiOH correlates strongly with the
strength of this peak. In addition, although porous silicon consists
of a surface whose roughness is of the order of nanometres, it has bee
n possible to obtain depth-profiling from reflected EXAFS (REFLEXAFS)
from some samples. The REFLEXAFS XANES again show the additional featu
re, the strength of which increases with the intensity of the Si-Si pe
ak, that is with depth.