Sb. Trickey et al., MATERIALS SPECIFICITY, QUANTUM LENGTH SCALES, AND STOPPING POWERS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 93(2), 1994, pp. 186-194
Standard arguments, based primarily on behavior at high projectile ene
rgies and classical notions of thickness as a continuous parameter, as
sert that stopping powers are only modestly affected by target chemist
ry and aggregation and -by sample thickness if the thickness is ''suff
iciently small'' (and channeling is avoided). Sufficient thinness usua
lly is defined in terms of freedom from multiple scattering and from p
rojectile charge-state changes. The growing technological importance o
f extremely thin material layers (e.g. microelectronics) has motivated
re-examination of both the thickness and aggregation-state assertions
. We give arguments to show that both are inadequate and reappraise re
cent computations in confirmation. A particular focus is the proper de
finition of thickness for an ultrathin film of nu atomic planes (nu =
1, 2, 3....).