Crystalline and stoichiometric KNbO3 thin films have been grown on (10
0) oriented MgO substrates by pulsed laser deposition technique. Elect
ron microprobe analysis and Rutherford backscattering spectroscopy of
the films show a progressive loss of K with increasing substrate-targe
t distance. To compensate for this K loss the ceramic KNbO3 targets we
re enriched with K2CO3 powder, pressed at room temperature, and sinter
ed at 650-degrees-C. For a substrate-target distance of 6 cm, targets
with [K]/[Nb] molar ratio = 2.85 yield stoichiometric KNbO3 films. A p
artial oxygen pressure of 2 X 10(-2) mbar was optimum for growing tran
sparent films. Films grown between 650 and 700-degrees-C show the KNbO
3 crystalline phase with its (110) axis preferentially oriented perpen
dicular to the surface of the substrate. At these temperatures KNbO3 d
iffusion into the MgO substrate is observed. Films grown from KNbO3 si
ngle crystal targets only contain a Mg4Nb2O9 crystalline layer.