Dg. Cahill et Th. Allen, THERMAL-CONDUCTIVITY OF SPUTTERED AND EVAPORATED SIO2 AND TIO2 OPTICAL COATINGS, Applied physics letters, 65(3), 1994, pp. 309-311
The thermal conductivity of SiO2 and TiO2 optical coatings are measure
d in the temperature range 80-400 K. For SiO2, the thermal conductivit
y of sputtered and evaporated films are 77% and 55% of the bulk value,
respectively, independent of temperature. Similarly, the thermal cond
uctivity of evaporated TiO2 is 63% of the conductivity of sputtered Ti
O2.